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論文

Metal adsorbent for alkaline etching aqua solutions of Si wafer

玉田 正男; 植木 悠二; 瀬古 典明; 竹田 俊英*; 川野 伸一*

Radiation Physics and Chemistry, 81(8), p.971 - 974, 2012/08

 被引用回数:7 パーセンタイル:48.31(Chemistry, Physical)

半導体の製造プロセスにおいて、シリコンウエーハー表面は48%のアルカリ溶液でエッチング処理される。このアルカリ溶液にニッケルや銅イオンが含まれていると、シリコンウエーハー表面に小さな凹みが発生し、生産効率の低下を招くことになる。市販の捕集材は、強アルカリ溶液中で収縮し、金属イオン性能が十分に発揮できない。そこで、放射線グラフト重合法により、ポリエチレン基材に金属除去機能を導入して、強アルカリ溶液中で使用可能な繊維状の捕集材を作製した。水にモノマーを分散することで反応効率が向上するエマルショングラフト重合を適合することにより、合理的なコストで製造することが可能となり、メトレートという商標で実用化した。メトレートは市販の捕集材の10倍の吸着容量と吸着処理速度を有している。

論文

Synthesis of arsenic graft adsorbents in pilot scale

保科 宏行; 笠井 昇; 柴田 卓弥*; 明田川 康*; 高橋 牧克*; 吉井 明央*; 角田 安彦*; 瀬古 典明

Radiation Physics and Chemistry, 81(8), p.1033 - 1035, 2012/08

 被引用回数:4 パーセンタイル:31.96(Chemistry, Physical)

The zirconium (Zr(IV))-type adsorbent for As(V) removal was synthesized by radiation-induced graft polymerization with phosphoric monomer and the subsequent chemical modification with Zr(IV) by loading on phosphoric units. The Zr(IV)-type adsorbent can rapidly remove As(V) to low concentration. In order to apply for a large amount of water treatment, it is necessary to construct of synthesis method in pilot scale. Synthesis method of graft adsorbent in pilot scale was investigated by setting up the equipment which was composed of reaction tanks, washing tank and pump. The equipment can produce the adsorbent which is maximum 0.3 $$times$$ 20 m size in one batch graft reaction. To evaluate the optimum condition in this equipment, it was required the optimization of several condition such absorbed dose, monomer concentration, reaction temperature and reaction time. A nonwoven cotton fabric as a trunk polymer was irradiated, then it was placed into the reaction tank with the deaerated monomer solution. The components of the monomer was phosphoric acid mono- (50%) and di- (50%) ethyl methacrylate ester. As a result, the degree of grafting of 150% was obtained at absorbed dose of 20 kGy with 5% monomer solution mixed by deionized water for 2 hours at 40 $$^{circ}$$C. Finally after loaded of Zr(IV) on grafted nonwoven fabric, As(V) adsorbent was achieved in pilot scale.

論文

Preparation of metal adsorbent from poly(methyl acrylate)-grafted-cassava starch via $$gamma$$ irradiation

Suwanmala, P.*; Hemvichian, K.*; 保科 宏行; Srinuttrakul, W.*; 瀬古 典明

Radiation Physics and Chemistry, 81(8), p.982 - 985, 2012/08

 被引用回数:12 パーセンタイル:63.41(Chemistry, Physical)

Metal adsorbent containing hydroxamic acid groups was successfully synthesized by radiation-induced graft copolymerization of methylacrylate onto cassava starch. The optimum conditions for grafting were studied in terms of % degree of grafting (Dg). Conversion of the ester groups present in poly(methyl acrylate)-grafted-cassava starch copolymer into hydroxamic acid was carried out by treatment with hydroxylamine in the presence of alkaline solution. The adsorbent of 191%Dg had total adsorption capacities of 2.6, 1.5, 1.4, 1.2 and 1.6 mmol/g-adsorbent for Cd$$^{2+}$$, Al$$^{3+}$$, UO$$_2^{2+}$$, V$$^{5+}$$, and Pb$$^{2+}$$, respectively, in the batch mode adsorption.

口頭

Arsenic removal from streaming water with graft adsorbent

瀬古 典明; 保科 宏行; 笠井 昇; 高橋 牧克*; 吉井 明央*; 角田 安彦*; 柴田 卓弥*; 明田川 康*

no journal, , 

Purification of waste water is important task from the viewpoint of economy and environmental preservation. In general, synthetic polymers such as polyethylene and polypropylene have been used as trunk polymer fibers due to their reactivity in the grafting process and high mechanical strength. Synthetic trunk polymers are, however, derived from petroleum resources. If a natural polymer such as cellulose is used as the trunk polymer for graft polymerization, the dependence on petroleum resources would decrease. In this study, a fibrous adsorbent for the removal of arsenic ion was synthesized by radiation-induced emulsion graft polymerization of 2-hydroxyethyl methacrylate phosphoric acid monomer (PA) onto nonwoven cotton fabric, and subsequent chemical modification by zirconium salts. The optimal pre-irradiation dose for initiation of graft polymerization of PA, which minimized the effects of radiation damage on the mechanical strength of the nonwoven cotton fabric, was found to be 20 kGy. The synthesized fibrous adsorbents were applied for the removal of arsenic from streaming water. The purification system for 10 tons streaming water was assembled by stack of graft adsorbents in preliminal experiment. These adsorbents were decomposed by microorganisms and roughly 60 % in fabrics was finally changed to CO$$_2$$ in 3 months.

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